CMOS-MEMS Vibro-Impact Devices and Applications

CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability. For example, a 0.35-µm CMOS-based capacitively transduced comb-driven folded-beam resonant switch has integrated backend circuits demonstrate zero-quiescent power wireless receiver operating at the low-frequency (LF) band. In addition, CMOS-MEMS resonators used as AFM-alike surface condition monitoring for detecting chemical coating on structural sidewalls clock generators controllable duty cycles by manipulating actuation conditions. This article will review these achievements discuss limitations challenges in developing using technology.